As the demand for advanced electronics and generative AI continues to surge globally, the semiconductor manufacturing industry faces critical challenges regarding waste management, particularly concerning per- and polyfluoroalkyl substances (PFAS). In a comprehensive review published in the esteemed journal Environmental Science & Technology, researchers have scrutinized the state of science, technology, and policy surrounding PFAS management within this rapidly evolving sector. Notably, a consensus among experts has led to the identification of vital recommendations aimed at enabling sustainable growth in semiconductor production while addressing the pressing environmental concerns associated with PFAS contamination.
The unique properties of PFAS, often referred to as “forever chemicals,” render them indispensable in semiconductor manufacturing processes such as photolithography and etching. However, their persistence in the environment, coupled with significant health risks, presents a formidable challenge for the industry. The spotlight on PFAS has intensified as regulatory frameworks evolve and public awareness grows, underscoring the need for sustainable practices in an industry poised for unprecedented growth.
Highlighting the enormity of the waste management challenge, Professor Xiao Su from the University of Illinois Urbana-Champaign articulated the scale of the issue. He stated, “Managing the waste from these facilities is a massive undertaking.” A large semiconductor factory can generate thousands of cubic meters of wastewater daily, resulting in a complex mixture of PFAS, solvents, metals, and salts. This intricate “soup” of industrial byproducts complicates waste treatment efforts, highlighting the urgency for innovative solutions to address PFAS contamination effectively.
A pivotal workshop funded by the National Science Foundation, held in August 2024, gathered experts from academia, industry, and government to explore strategies for mitigating PFAS waste challenges. The resulting review synthesizes insights from this collaborative dialogue, presenting a cohesive perspective on the current state of PFAS research and outlining a roadmap for future actions required to address these challenges comprehensively.
Lead co-author Devashish Gokhale, a postdoctoral researcher in Su’s research group, emphasized the collaborative nature of the review. He noted that it serves as a consensus statement reflecting the field’s current landscape and the necessary steps forward to resolve the PFAS dilemma while facilitating sustainable growth in semiconductor manufacturing. The review stands as a testament to the need for interdisciplinary cooperation and innovation to overcome the entwined issues of technological advancement and environmental responsibility.
Identifying three priority focus areas, the authors propose a multi-faceted approach to address PFAS waste effectively: improved monitoring, efficient separation, and safe destruction. Advanced tools, particularly artificial intelligence combined with high-resolution mass spectrometry, have emerged as promising techniques for tracing the origins of PFAS and understanding their transformations during manufacturing processes. Furthermore, the exploration of technologies for breaking chemical bonds—such as plasma discharge and electrochemical oxidation—represents a significant step towards developing effective PFAS treatment methods.
Despite progress, the review acknowledges that many of the existing technologies were initially designed for municipal water systems and may require substantial modification to manage the complexities of industrial waste effectively. Traditional water treatment processes often overlook PFAS, particularly the short and ultrashort-chain variants prevalent in semiconductor production. Thus, researchers face the uphill battle of adapting and enhancing existing methods to capture these elusive compounds accurately.
The integration of innovative solutions into existing manufacturing systems presents another layer of complexity. Gokhale aptly noted, “A typical semiconductor fabrication facility could easily have hundreds or even a thousand manufacturing steps, and these are all integrated with each other.” Any new treatment solutions must seamlessly fit within the existing operational framework, ensuring that highly optimized processes remain unaffected while effectively addressing PFAS contamination.
Beyond the technical hurdles associated with waste management, the review highlights several non-technical factors that warrant consideration for successful PFAS mitigation. A deeper understanding of the transmutable chemical properties of PFAS is crucial, as is the anticipation of forthcoming regulatory measures that may shape the landscape of semiconductor manufacturing. Access to real industrial waste streams for experimental research is imperative, as is the scaling up of laboratory-developed technologies for practical implementation in industrial settings.
The continued escalation of interest in solutions to the PFAS dilemma marks an exhilarating time for researchers engaged in this field. Gokhale expressed optimism about the high-value applications that semiconductor technology can offer, emphasizing the potential for translating academic research into industrial practice. This intersection of academic inquiry and industry demand creates a unique opportunity for innovation and investment in sustainable manufacturing practices.
A central theme of the review is the urgent call for enhanced collaboration between academia, industry, and policymakers. Building these partnerships is essential for developing integrated solutions that promise to achieve a “zero-discharge” future for semiconductor manufacturing. Su reiterated this vision, emphasizing the need for compact, cost-effective systems capable of functioning effectively within existing and future factories constrained by space and resources.
The paper serves as a rallying cry for collective action in addressing PFAS waste management challenges, presenting a compelling case for proactive engagement among stakeholders. The roadmap outlined by the authors reflects a growing recognition of the intertwined nature of technological advancement and environmental stewardship. By fostering a culture of collaboration and innovation, the semiconductor industry can navigate the complexities of PFAS management while contributing to a healthier, more sustainable future.
As this discourse unfolds, the importance of continued research and dialogue cannot be overstated. With an ever-increasing reliance on semiconductor technology in modern society, the imperative to find viable solutions to PFAS waste management has never been more pressing. The insights derived from this review provide a foundational platform for advancing the technical and policy frameworks necessary for a sustainable semiconductor industry.
In summary, the comprehensive analysis of PFAS waste management in semiconductor manufacturing underscores the intricate relationship between technology, policy, and environmental health. The collaborative efforts of researchers, industry experts, and policymakers will play a pivotal role in shaping a future where semiconductor manufacturing thrives alongside environmental safety and regulatory compliance. As the world moves further into a technology-driven era, the challenge of managing PFAS waste remains a critical focus for ensuring the sustainability of this vital industry.
Subject of Research: PFAS Waste Management in Semiconductor Manufacturing
Article Title: Challenges and Opportunities in PFAS Waste Management for Semiconductor Manufacturing
News Publication Date: 11-Feb-2026
Web References: doi.org/10.1021/acs.est.5c10109
References: Environmental Science & Technology
Image Credits: The Grainger College of Engineering at the University of Illinois Urbana-Champaign
Keywords
Tags: advanced electronics manufacturing wasteenvironmental impact of forever chemicalsgrowing demand for generative AI technologieshealth risks of PFAS exposureper- and polyfluoroalkyl substances regulationPFAS waste management in semiconductor manufacturingphotolithography and etching chemicalspolicy recommendations for PFAS managementpublic awareness of PFAS issuessemiconductor industry challengessemiconductor production and environmental sustainabilitystrategies for sustainable semiconductor production
