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	<title>micromirror &#8211; BIOENGINEER.ORG</title>
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		<title>Tiny piezoelectric mirror steers and refocuses light at microsecond speeds</title>
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		<pubDate>Mon, 26 Oct 2026 22:14:01 +0000</pubDate>
				<category><![CDATA[Chemistry]]></category>
		<category><![CDATA[augmented reality]]></category>
		<category><![CDATA[biological imaging]]></category>
		<category><![CDATA[laser micromachining]]></category>
		<category><![CDATA[MEMS]]></category>
		<category><![CDATA[micro-optics]]></category>
		<category><![CDATA[micromirror]]></category>
		<category><![CDATA[mirror]]></category>
		<category><![CDATA[piezoelectric actuation]]></category>
		<category><![CDATA[semiconductor manufacturing]]></category>
		<category><![CDATA[three-dimensional laser scanning]]></category>
		<category><![CDATA[Tiny]]></category>
		<category><![CDATA[varifocal optics]]></category>
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					<description><![CDATA[An experimental millimeter-scale piezoelectric MEMS mirror steered light along two axes and shifted its focus by 63 millimeters at microsecond speeds.]]></description>
		
		
		
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